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Ebara Precision Machinery


The Japanese EBARA Precision Machinery Company (parent company of EBARA Precision Machinery Europe) is a leading worldwide supplier of components and systems for semiconductor, LED, Photovoltaic, Flat Panel, MEMS applications. The product range covers vacuum pumps, exhaust gas cleaning systems and accessories, Chemical-Mechanical Polishing systems, Plating systems, Ozone generators, functional water generators and EPIX Filters.

EBARA Precision Machinery Europe GmbH (EPME) was formed in 1994 as a subsidiary of the EBARA Precision Machinery Company which belongs to EBARA Corporation, a large Japanese engine building company. With about 120 employees, EPME is active in sales, service and applications for the entire product range and major engineering projects in the semiconductors, LED and photovoltaic area.

The highly innovative EBARA products can be found in use at the major manufacturers in the silicon chip industry, the LED industry and the PV industry. The company covers customers in Europe, Eastern Europe and the Middle East. The European headquarters are located in Hanau, Germany; other locations are in France, Great Britain, Ireland, Israel and Austria.

The unique product features, our applications and engineering know-how, along with the obligation to superior quality and support commitment, generate highest customer satisfaction and are the key to success for EBARA Precision Machinery Europe GmbH.